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The operational scope includes technical services, development, consulting, and technology transfer. Expertise covers computer software and hardware, sales of functional glass, new optical materials, optical instruments, and specialized equipment for semiconductor devices. Further capabilities involve experimental analysis instruments, CNC machine tools, electronic components, electromechanical equipment, metal cutting and welding equipment, fiber optics, photovoltaic components, and optical glass.
| Category | Parameter | FM-UVM20A | FM-UVM20B |
|---|---|---|---|
| Laser | Wavelength | 355nm | 355nm |
| Laser | Power | 20W (3~40W optional) | 20W (3~40W optional) |
| Laser | Modulation Frequency | 1~200kHz | 1~200kHz |
| Laser | Pulse Width | 15ns@40kHz | 15ns@40kHz |
| Laser | Beam Quality M² | <1.2 | <1.2 |
| Galvanometer | Scan Range | <50*50mm | <15*15mm |
| Galvanometer | Repeatability | <1μm | <1μm |
| Galvanometer | Positioning Accuracy | ≤±3μm | ≤±3μm |
| XY Stage | Travel | 300*300mm | 300*300mm |
| XY Stage | Repeatability | ≤±1μm | ≤±1μm |
| Z Axis | Travel | 150mm | 150mm |
| Z Axis | Repeatability | ≤±3μm | ≤±3μm |
| CCD Monitoring | Camera | 5-megapixel | 5-megapixel |
| Processing | Minimum Spot Size | 8μm | 5μm |
| Processing | 3D Etching | Supported | Supported |
| Processing | Materials | Glass, organics, metals, ceramics, etc. | Glass, organics, metals, ceramics, etc. |
| Cooling | Method | Water-cooled | Water-cooled |
| Power | Consumption | ≤2000W | ≤2000W |
| Weight | Total Weight | 1200Kg | 1200Kg |
Note: Achieved after preheating for 30 minutes at a constant temperature of (25±0.5ºC).




